UC Davis

Image Gallery

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Lithography resolution pattern etched into SOI via DRIE. The structure beneath the line of text is an optical fiber.


MEMS Optical Switch
8x8-port fiber-optic switch using magnetically-actuated, electrostatically-clamped MEMS mirrors.


MEMS VOA
A variable optical attenuator (VOA) micromachined in SOI. Attenuation is achieved by introducing a metallized silicon shutter into the air-gap between two optical fibers.


Nonlinear Resonance
The resonant frequency of an electrostatically-actuated mirror varies with the tilt angle of the mirror, as shown in this plot of experimentally-measured mirror frequency response.