Stefon's Research
Aluminum Nitride Ultrasonic Doppler Velocity Sensor
Introduction
The goal of this project is to develop a high precision MEMS ultrasonic
Doppler velocity sensor utilizing an array of Aluminum Nitride transducer
elements for use in personal navigation units. Aluminum Nitride has been
chosen for its desirable piezoelectric properties and compatibility with
CMOS processes which allows for on chip integration of MEMS and
electronics. In our device we aim to produce an ultrasound
source-receiver pair with integrated signal processing circuitry on a
single chip. To determine the velocity we will be developing and
implementing an efficient and accurate signal processing scheme to detect
the Doppler shift of the backscattered ultrasound wave.